TY - JOUR PY - 2019 J2 - Appl. Surf. Sci. SN - 0169-4332 T2 - Applied Surface Science VL - 478 DO - 10.1016/j.apsusc.2019.01.174 TI - TiSiN(Ag) films deposited by HiPIMS working in DOMS mode: Effect of Ag content on structure, mechanical properties and thermal stability UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1718317 KW - TiSiN(Ag) KW - Mechanical properties KW - Structure KW - Annealing KW - HiPIMS AU - Cavaleiro D AU - Carvalho S AU - Cavaleiro A AU - Fernandes F SP - 426 EP - 434 LA - English ER -