TY - JOUR PY - 2019 J2 - Curr. Appl. Phys. SN - 1567-1739 T2 - Current Applied Physics VL - 19 IS - 4 DO - 10.1016/j.cap.2019.02.008 TI - Formation of Ohmic contacts on laser irradiated n-type 6H-SiC without thermal annealing UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1695481 KW - SiC KW - Ohmic contact KW - Excimer laser KW - Barrier height AU - Wu Y AU - Ji LF AU - Lin ZY AU - Hong MH AU - Wang SC AU - Zhang YZ SP - 521 EP - 527 LA - English ER -