TY - JOUR PY - 2019 J2 - Appl. Surf. Sci. SN - 0169-4332 T2 - Applied Surface Science VL - 466 DO - 10.1016/j.apsusc.2018.10.068 TI - Probing surface electronic properties of a patterned conductive STO by reactive ion etching UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1689495 KW - Oxide surface KW - Strontium titanate KW - Surface metallization KW - Surface doping KW - Plasma treatment AU - Jin MJ AU - Choe D AU - Lee SY AU - Park J AU - Jo J AU - Oh I AU - Kim SI AU - Baek SH AU - Jeon C AU - Yoo JW SP - 730 EP - 736 LA - English ER -