TY - JOUR PY - 2019 J2 - Appl. Surf. Sci. SN - 0169-4332 T2 - Applied Surface Science VL - 476 DO - 10.1016/j.apsusc.2019.01.177 TI - Investigation of growth characteristics, compositions, and properties of atomic layer deposited amorphous Zn-doped Ga2O3 films UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1688536 KW - Ga2O3 KW - ZnO KW - ZGO KW - Atomic layer deposition AU - Tao JJ AU - Lu HL AU - Gu Y AU - Ma HP AU - Li X AU - Chen JX AU - Liu WJ AU - Zhang H AU - Feng JJ SP - 733 EP - 740 LA - English ER -