TY - JOUR PY - 2017 J2 - Appl. Surf. Sci. SN - 0169-4332 T2 - Applied Surface Science VL - 393 DO - 10.1016/j.apsusc.2016.10.014 TI - A numerical study of ultraprecision machining of monocrystalline silicon with laser nano-structured diamond tools by atomistic simulation UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1509930 KW - Molecular dynamics KW - Phase transformation KW - Laser nano-structured diamond tool KW - Subsurface damage KW - Ultraprecision machining AU - Dai HF AU - Chen GY AU - Zhou C AU - Fang QH AU - Fei XJ SP - 405 EP - 416 LA - English ER -