TY - JOUR PY - 2016 J2 - Thin Solid Films SN - 0040-6090 T2 - Thin Solid Films VL - 608 DO - 10.1016/j.tsf.2016.04.012 TI - Controlling In-Ga-Zn-O thin films transport properties through density changes UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1464064 KW - In-Ga-Zn-O KW - IGZO KW - Atom Probe Tomography KW - Amorphous oxide semiconductors KW - Schottky contacts AU - Kaczmarski J AU - Boll T AU - Borysiewicz MA AU - Taube A AU - Thuvander M AU - Law JY AU - Kaminska E AU - Stiller K SP - 57 EP - 61 LA - Multi-Language ER -