TY - JOUR PY - 2014 J2 - Thin Solid Films SN - 0040-6090 T2 - Thin Solid Films VL - 570 DO - 10.1016/j.tsf.2014.03.026 TI - Deposition of fluorocarbon film with 1,1,1,2-tetrafluoroethane pulsed plasma polymerization UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1339692 KW - Fluorocarbon film KW - Pulsed plasma KW - 1,1,1,2-Tetrafluoroethane KW - Plasma polymerization KW - Super-hydrophobic KW - Duty cycle AU - Wang YR AU - Ma WC AU - Lin JH AU - Lin HH AU - Tsai CY AU - Huang C SP - 445 EP - 450 LA - Multi-Language ER -