TY - JOUR PY - 2005 J2 - Korean J. Mater. Res. SN - 1225-0562 T2 - Korean Journal of Materials Research VL - 15 IS - 2 DO - 10.3740/MRSK.2005.15.2.139 TI - ZrO 2 MIM 캐패시터의 구조, 표면 형상 및 전기적 특성 TI - The Structure, Surface Morphology and Electrical Properties of ZrO 2 Metal-insulator-metal Capacitors UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1291211 KW - Gate dielectrics KW - rf-magnetron sputtering KW - I-V characteristic curve KW - C-V characteristic curve AU - 김대규 AU - 이종무 AU - Kim DK AU - Lee C SP - 139 EP - 142 LA - Multi-Language ER -