TY - JOUR PY - 2005 J2 - Korean J. Mater. Res. SN - 1225-0562 T2 - Korean Journal of Materials Research VL - 15 IS - 11 DO - 10.3740/MRSK.2005.15.11.741 TI - ZnO 성장을 위한 Atomic Layer Deposition법에서 공정온도가 박막의 구조적 및 광학적 특성에 미치는 영향 TI - Effects of Substrate Temperature on the Microstructure and Photoluminescence Properties of ZnO Thin Films by Atomic Layer Deposition UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1290917 KW - ZnO thin films KW - atomic layer deposition KW - substrate temperature microstructure KW - photoluminescence AU - 임종민 AU - 이종무 AU - Lim J AU - Lee C SP - 741 EP - 744 LA - Multi-Language ER -