TY - JOUR PY - 2012 J2 - Thin Solid Films SN - 0040-6090 T2 - Thin Solid Films VL - 520 IS - 6 DO - 10.1016/j.tsf.2011.09.045 TI - Front and backside-illuminated GaN/Si based metal-semiconductor-metal ultraviolet photodetectors manufactured using micromachining and nano-lithographic technologies UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1066095 KW - UV photodetector KW - Responsivity KW - GaN membrane KW - e beam lithography AU - Muller A AU - Konstantinidis G AU - Androulidaki M AU - Dinescu A AU - Stefanescu A AU - Cismaru A AU - Neculoiu D AU - Pavelescu E AU - Stavrinidis A SP - 2158 EP - 2161 LA - Multi-Language ER -