TY - JOUR PY - 2010 J2 - Thin Solid Films SN - 0040-6090 T2 - Thin Solid Films VL - 518 IS - 22 DO - 10.1016/j.tsf.2010.01.047 TI - Synthesis and characterization of self-assembled ZnO nano-dots grown on SiNx/Si(001) substrates by radio frequency magnetron sputtering UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1063809 KW - ZnO KW - Nano-pyramids KW - SiN/Si substrate KW - RF magnetron sputtering AU - Sun JH AU - Kang HC SP - 6522 EP - 6525 LA - Multi-Language ER -