TY - JOUR PY - 2009 J2 - Thin Solid Films SN - 0040-6090 T2 - Thin Solid Films VL - 518 IS - 4 DO - 10.1016/j.tsf.2009.08.053 TI - Analysis of thermal effect on transparent conductive oxide thin films ablated by UV laser UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1062750 KW - Heat affected zone KW - Electro-optical efficiency KW - Debris KW - Micro-crack KW - Temperature distribution AU - Chen MF AU - Ho YS AU - Hsiao WT AU - Huang KC AU - Chen YP SP - 1067 EP - 1071 LA - Multi-Language ER -