Skip to main content
Log in

Aroused problems in the deposition of diamond-like carbon films by using the liquid phase electrodeposition technique

  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

Hydrogenated diamond-like carbon (DLC) films were prepared by using liquid phase electrodeposition technique. The effects of the applied potential and the carbon sources on the deposition process and film structures were studied. It has been found that the organic liquids with high dielectric constants, small viscosities and the methyl group bonding to the polar group are appropriate carbon sources. The increasing of potential improves the formation of sp3 carbon during the deposition process. In a high electric field, organic molecules are polarized and reacted on the surface of the electrode, turning out DLC and other products. It is believed that the reaction follows a polarization-reaction mechanism.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Namba, J. Vac. Sci. Technol. A 10 (1992) 3368.

    Google Scholar 

  2. T. Suzuki, Y. Manita, T. Yamazaki, S. Wada and T. Noma, J. Mater. Sci. 30 (1995) 2067.

    Google Scholar 

  3. Idem., ibid. 31 (1996) 3743.

  4. S. E. Kwiatek, V. Desai, P. J. Moran and P. M. Natishan, ibid. 32 (1997) 3123.

    Google Scholar 

  5. H. Wang, M. R. Shen, Z. Y. Ning, C. Ye, H. Y. Dang, C. B. Cao and H. S. Zhu, Thin Solid Films 293 (1997) 87.

    Google Scholar 

  6. Idem., Appl. Phys. Lett. 69 (1996) 1074.

    Google Scholar 

  7. V. P. Novikov and V. P. Dymont, ibid. 70 (1997) 200.

    Google Scholar 

  8. CRC Handbook of Chemistry and Physics, edited by Robert C. Weast, 58th ed. (CRC Press Inc., 18901 Cranwood Parkway Cleveland Ohio 44128. (1977-78).

    Google Scholar 

  9. Jinting Jiu, Cai Kai, et al., Mater. Lett. 41 (1999) 63; JINTING JIU, HAO WANG, et al., Mater. Res. Bull. 34 (10/11); (1999) 1501.

    Google Scholar 

  10. R. J. Nemanich, T. Glass, G. Lucovsky and R. E. Shroder, J. Vac. Sci. Technol. A 6 (1988) 1783.

    Google Scholar 

  11. D. S. Knight and W. B. White, J. Mater. Res. 4 (1989) 385.

    Google Scholar 

  12. Y. Wang, D. C. Alsmeyer and R. L. Mc Creery, Chem: Mater. 2 (1990) 5567.

    Google Scholar 

  13. D. Beeman, J. Sliverman, R. Lynds and M. R. Anderson, Phys. Rev. B 30 (1984) 870.

    Google Scholar 

  14. A. Richter and H. J. Scheibe, J. Non-Cryst. Solids 88 (1986) 131.

    Google Scholar 

  15. M. Kitabatake and K. Wasa, Appl. Phys. Lett. 58 (1985) 1693.

    Google Scholar 

  16. S. F. Yoon, Rusli, J. Ahn, Q. Zhang, et al., Diamond Relat. Mater. 7 (1998) 1213.

    Google Scholar 

  17. F. Tuinstra and J. L. Koening, J. Chem. Phys. 53 (1970) 1126.

    Google Scholar 

  18. D. G. McCulloch and S. Prawer, J. Appl. Phys. 78 (1995) 3040.

    Google Scholar 

  19. M. A. Tamor, J. A. Haire, C. H. Wu and K. C. Hass, Appl. Phys. Lett. 54 (1989)

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Zhu, HS., Jiu, JT., Fu, Q. et al. Aroused problems in the deposition of diamond-like carbon films by using the liquid phase electrodeposition technique. Journal of Materials Science 38, 141–145 (2003). https://doi.org/10.1023/A:1021130303447

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1021130303447

Keywords

Navigation