Abstract
The physical plasma parameters, temperature and electron number density, are studied in the RF-IC (RF inductively coupled) discharge at a reduced pressure of 3 Torr in mixtures of MoF6 with Ar, H2 and CH4. The emission spectra of mixtures are investigated. It is shown that in the presence of argon, the concentration of free electrons in plasma and dissociation rate of MoF6 increase. A main role of molecular hydrogen is the generation of atomic hydrogen that binds atomic fluorine and leads to the formation of gaseous and solid products. Exhaust gas mixtures exiting the reactor are analyzed by mass spectrometry. It is shown that for all cases, the conversion of MoF6 into reaction products is close to 100%. A thermodynamic analysis of the equilibrium composition of MoF6 systems with Ar, H2 and CH4 was carried out and the obtained results are in good agreement with experimentally observed composition of the solid and gas phases. Analysis of solid deposits from mixture MoF6/H2/Ar revealed the presence of molybdenum powder and large amount of amorphous MoFx. The deposit obtained from mixtures with methane, MoF6/H2/Ar/CH4, contained crystalline molybdenum carbide, Mo3C2.
Similar content being viewed by others
References
Galkin NP, Tumanov YN (1971) Russian Chem Rev 40:154–164
Borisevich VD, Khoroshilov AV, Cherednichenko SA (2005) 5th Int Conf Isotopes Brussel Belgium April 25-29 193-201
Nakajima T, Shirasaki T (1997) J Electrochem Soc 144:2096–2100
Di Giuseppe G, Selman JR (2003) J Electroanal Chem 559:31–43
Wolden CA, Pickerell A, Gawai T, Parks S, Hensley J, Douglas Way J (2011) ACS Appl Mater Interfaces 3:517–521
Zhao H, Cai K, Ma Z, Cheng Z, Jia T, Kimura H, Fu Q, Tao H, Xiong L (2018) J Appl Phys 123:053301–053306
McDonald HO, Stephenson JB (1979) Chemical Vapor Deposition of Group IVB, VB, and VIB Elements: A Literature Review US Department of Interior. Bureau of Mines Information Circular, P5
Shabarova LV, Sennikov PG, Kornev RA, Plekhovich AD, Kutyin AM (2019) High Energy Chem 53:482–489
Shabarova LV, Plekhovich AD, Kutyin AM, Sennikov PG, Kornev RA (2019) High Energy Chem 53:155–161
Kornev RA, Sennikov PG, Konychev DA, Potapov AM, Chuvilin DY, Yunin PA, Gusev SA, Naumann M (2016) J Radioanal Nucl Chem 309:833–840
The supply of medical radioisotopes: review of potential Molybdenum-99/Technetium-99 m production technologies (2010). OECD. Nuclear Energy Agency
Chu JK, Tang CC, Hess DW (1982) Appl Phys Lett 41:75–77
Tang CC, Chu JK, Hess DW (1983) Solid State Technol 26:125–128
Kornev RA, Sennikov PG, Nazarov VV (2017) Plasma Phys Technol 4:169–172
Fox-Lyon N, Knoll AJ, Franek J, Demidov V, Godyak V, Koepke M, Oehrlein GS (2013) J Phys D Appl Phys 46:485202–485206
Mutsukura N, Ohuchi M, Satoh S, Machi Y (1983) Thin Solid Films 109:47–57
Bruno G, Capezzuto P, Cicala G (1991) J Appl Phys 69:7256–7266
Sukhanov YN, Ershov AP, Rudenko KV, Orlikovsky AA (2005) Plasma Proc Polym 2:472–479
Kut’in AM, Polyakov VS (2007) XVI International Conference on Chemical Thermodynamics Russia July 1-6 2:514-515
Belov SG, Iorish VS, Yungman VS (2000) High Trmperature 38:191–196
Stern KH, Weise EL (1966) High temperature properties and decomposition of inorganic salts, NSRDS- NBS7. US Gov Print Office, Washington, D.C.
Gurvich LV, Veitz IV, Alcock CB (1989) Thermodynamic Proper- ties of Individual Substances, New York: Hemisphere 21
Rodríguez J, Yousif FB, Fuentes BE, Vázquez F, Rivera M, López-Patiño J, Figueroa A, Martínez H (2018) Phys Plasmas 25:053512–053521
Zhao G, Wang H, Si X (2017) Phys Plasmas 24:123507–123514
Boris DR, Fernsler RF, Walton SG (2015) Plasma Sources Sci Technol 24:025032–025041
Sennikov PG, Kornev RA, Mochalov LA, Shilaev AA, Golubev SV (2014) High Energy Chem 48:49–53
Kornev RA, Sennikov PG (2015) Plasma Chem Plasma Proc 35:1111–1118
Zaidel AN, Prokofiev VК, Raiskii SM, Slavnyi VA, Shreider EYa (1969) [Tables of spectral lines] M.: Nauka, 782 pp. [in Russian]
Beattie WH (1975) Appl Spectroscopy 29:334–337
Gusev AV, Kornev RA, Sukhanov AY (2013) High Energy Chem 47:272–274
Acknowledgements
The authors are very grateful to Dr. M. Drozdov and Dr. P. Yunin for help with XRF and SIMS measurements. The RSF Grant No 20-13-00035 and support from the Russian Ministry of Education and Science (subject 0095-2019-0008) are greatly acknowledged.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Sennikov, P.G., Gornushkin, I.B., Kornev, R.A. et al. Hydrogen Reduction of MoF6 and Molybdenum Carbide Formation in RF Inductively Coupled Low-Pressure Discharge: Experiment and Equilibrium Thermodynamics Consideration. Plasma Chem Plasma Process 41, 673–690 (2021). https://doi.org/10.1007/s11090-020-10138-3
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11090-020-10138-3